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Microprobe Facility

JEOL JXA-8530F Hyperprobe

The JXA-8530F utilizes a field emission (FE) electron gun that makes it possible to perform elemental analyses of solid surfaces down to ultra-micro-areas (40 nm) at a probe current of only 10 nA. The JXA-8530F also offers an improved electron optical and evacuation systems to take advantage of the FE gun. These improvements, over conventional filament electron sources, generate a smaller probe diameter at lower accelerating voltages allowing the JXA-8530F to make quantitative analyses at much higher resolution than any other microprobe. The analytical and imaging specifications of the JXA-8500F are shown in the table below. Please contact us with any questions regarding sample analysis.

JEOL JXA-8530F Specifications

Detectable Element Range Be to U
Detectable Wavelength Range 0.087 to 11.4 nm
Number of X-ray spectrometers 1-5 (Plus EDS)
Specimen size 100 mm x 100 mm x 5 mm
X-Y range 90 mm x 90 mm
Accelerating Voltage 30 kV (0.1 kV steps)
Probe Current Range 10 pA - 500 nA
Min. Probe Size 40 nm@10 kV, 10 nA
100 nm@10 kV, 100 nA
Scanning Magnification x40 - x300,000


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